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Temperature effect on the mechanical properties of gold nano films with different thickness C Birleanu, M Pustan, V Merie, R Müller, R Voicu, A Baracu and S Craciun Open abstract View article, Temperature effect on the mechanical properties of gold nano films with different thickness PDF, Temperature effect on the mechanical properties of gold nano films with different thickness The microelectronic industry has been growing rapidly over the past years, as has its reliance on thin-film deposition techniques for components manufacturing.
As modern devices generate quite a bit of heat and peak temperatures can reach over °C, there is a need to provide adequate cooling for a device to stay operable. A series of chrome gold films with various thicknesses were prepared on silicon substrate.
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The structural and surface morphology, adhesion, friction, Young's modulus and hardness of this thin film were studied for three different thicknesses under temperature variations between 20 to °C. Obviously these thermal cycles are unavoidable and eventually lead to thermal fatigue damage and device failure.
Consequently, the knowledge of mechanical properties of thin films at elevated temperatures is required for proper chip design and reliability assessments. Elastic modulus and hardness are two important mechanical properties of the thin-film structural materials used in microelectromechanical systems. The mechanical properties of electroplated chrome-gold thin film are found to be highly dependent on the manufacturing process and also of the thin film thickness.
On the other hand it is important to find the effect of temperature on these properties. Investigated samples are made of thin layers of chromium and facial slimming pulse roller with differences in thickness.
The three levels of nominal thicknesses of Au films are:and nm.
Each measurement was repeated many times in order to improve the accuracy of the experimental results.